Semiconductor Water Monitoring
Depending on the required water quality, UPW treatment plants often also feature degasification, microfiltration, ultrafiltration, ultraviolet irradiation, disinfection/sanitation processes. Therefore, instruments are needed that measure contaminant levels, such as: resistivity/conductivity, (dissolved) oxygen, turbidity, redox (ORP), pH, total organic carbon (TOC) and specialty measurements for specific ions.
Typical Instrumentation for Semicon Applications
Dissolved Oxygen
Specific Conductivity
pH
TOC
Specific Conductivity
Sodium
Specific Conductivity
Silica
Specific Conductivity
Acid Conductivity (CACE)
Silica
TOC
Specific Conductivity
Silica
Sodium
pH
Specific Conductivity
Sodium
TOC
TOC
Dissolved Oxygen
Specific Conductivity
pH
Dissolved Oxygen
Specific Conductivity
pH
TOC
TOC
TOC
Specific Conductivity
Silica
Sodium
Acid Conductivity (CACE)
Full Semiconductor Product Range
DISINFECTANTS
AMI Trides (reagent-free, various disinfectants)
AMI Codes-II (photometric, various disninfectants)
AMI Codes-II O3 (photometric, ozone)
CONDUCTIVITY & RESISTIVITY
pH/REDOX
SODIUM
AMI Sodium A (sample pH ≥ 2.0)
AMI Sodium P (sample pH ≥ 7.0)
AMI Soditrace (trace concentration, 0.001 ppb- 10 ppm)
TOTAL ORGANIC CARBON TOC
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